In this course, we will discover microelectromechanical systems (MEMS) in electrical engineering perspective, touching a complete set of design, fabrication, and applications. With respect to designing MEMS, we will explore various working principles, CAD tools including semiconductor design tools, and signal processing circuits. Also, core semiconductor processing technologies and a wide range of micro-machining techniques are studied in depth, in order to fabricate MEMS. We will address important issues in major fields of MEMS applications, including microsensors, RF/microwave, optical, and bio / microfluidic MEMS, especially in an electrical engineering viewpoint.
